Abstract
A novel open waveguide cavity resonator for the combined variable frequency microwave (VFM) curing of bumps, underfills and encapsulants, as well as the alignment of devices for fast flip-chip assembly, direct chip attach (DCA) or wafer-scale level packaging (WSLP) is presented. This invention achieves radio frequency (RF) curing of adhesives used in microelectronics, optoelectronics and medical devices with potential simultaneous micron-scale alignment accuracy and bonding of devices using VFM technology. The open oven cavity can befitted directly onto a flip-chip or wafer scale bonder and, as such, will allow for the bonding of devices through localised heating thus reducing the risk to thermally sensitive devices. © 2006 IEEE.
Original language | English |
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Title of host publication | ESTC 2006 - 1st Electronics Systemintegration Technology Conference |
Pages | 1149-1157 |
Number of pages | 9 |
Volume | 2 |
DOIs | |
Publication status | Published - 2007 |
Event | ESTC 2006 - 1st Electronics Systemintegration Technology Conference - Dresden, Saxony, Germany Duration: 5 Sept 2006 → 7 Sept 2006 |
Conference
Conference | ESTC 2006 - 1st Electronics Systemintegration Technology Conference |
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Country/Territory | Germany |
City | Dresden, Saxony |
Period | 5/09/06 → 7/09/06 |