A multi-mode MEMS sensor design to support system test and health & usage monitoring applications

Z. Xu, A. Richardson, D. Koltsov, L. Li, M. Begbie, C. H. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Health and usage monitoring (HUMS) as a technique for online test, diagnosis or prognosis of structures and systems has evolved as a key technology for future critical systems. The application of HOIS technology requires a portfolio of reliable miniaturized sensors, capable of delivering "intelligence" on the internal and external environment of a system or structure. This paper proposes a fault tolerant sensor architecture and demonstrates the feasibility of realising this architecture through the design of a dual mode humidity/pressure MEMS sensor with an integrated temperature function. The sensor has a simple structure, good linearity and sensitivity, and the potential for implementation of built-in Self-test features. We also propose a re-configurable sensor network based on the multi-functional sensor concept that supports both normal operational and fail safe modes. The architecture has the potential to significantly increase system reliability and supports a reduction in the number of sensors required in future HUMS devices. The technique has potential in a wide range of applications, especially within wireless sensor networks. © 2010 IEEE.

Original languageEnglish
Title of host publication2010 15th IEEE European Test Symposium, ETS'10
Publication statusPublished - 2010
Event2010 15th IEEE European Test Symposium - Prague, Czech Republic
Duration: 24 May 201028 May 2010


Conference2010 15th IEEE European Test Symposium
Abbreviated titleETS'10
Country/TerritoryCzech Republic


  • Bias superposition
  • Built-in-Self-test
  • Humidity sensor
  • HUMS
  • Multi-mode sensing
  • Online test
  • Pressure sensor
  • Self-repair
  • Sensor network
  • Sensor reliability
  • Wireless sensor network


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