A miniaturized ferrule-top optical cantilever for vibration measurement

J. Li, S. M. Xu, Jining Sun, Y. Q. Tang, F. Z. Dong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, we propose techniques to design and fabricate polymer micro-cantilevers for attachment onto the end of standard single mode fibers using laser machining. The polymer cantilever is fabricated by laser micro-machining a sheet of polymer into the required shape and then bonded onto the top of a ceramic ferrule by photo resist as a flat supporting and bonding layer. The dimension of resulting cantilever is ~1.2 mm long, ~300 μm wide, and 25 μm thick. In this work we describe the fabrication of single sensors, however the process could be scaled to offer a route towards mass production. Cantilever vibration caused by vibration signal are monitored by a DFB laser based phase interrogation system. Proof-of-concept experiments show that the sensor is capable of detecting vibration signal with a frequency range of 0-800Hz. By using thinner polymer sheet and machining longer cantilever, the frequency response range can be extended up to a few kHz.
Original languageEnglish
Title of host publication25th International Conference on Optical Fiber Sensors
EditorsYoungjoo Chung, Wei Jin, Byoungho Lee, John Canning, Kentaro Nakamura, Libo Yuan
PublisherSPIE
ISBN (Electronic)9781510610927
ISBN (Print)9781510610910
DOIs
Publication statusPublished - 23 Apr 2017
Event25th International Conference on Optical Fiber Sensors 2017 - Jeju, Korea, Republic of
Duration: 24 Apr 201728 Apr 2017

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume10323
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference25th International Conference on Optical Fiber Sensors 2017
Abbreviated titleOFS 2017
Country/TerritoryKorea, Republic of
CityJeju
Period24/04/1728/04/17

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