@inproceedings{d03585d393134680a7a4f9ae3709d996,
title = "A miniaturized ferrule-top optical cantilever for vibration measurement",
abstract = "In this paper, we propose techniques to design and fabricate polymer micro-cantilevers for attachment onto the end of standard single mode fibers using laser machining. The polymer cantilever is fabricated by laser micro-machining a sheet of polymer into the required shape and then bonded onto the top of a ceramic ferrule by photo resist as a flat supporting and bonding layer. The dimension of resulting cantilever is ~1.2 mm long, ~300 μm wide, and 25 μm thick. In this work we describe the fabrication of single sensors, however the process could be scaled to offer a route towards mass production. Cantilever vibration caused by vibration signal are monitored by a DFB laser based phase interrogation system. Proof-of-concept experiments show that the sensor is capable of detecting vibration signal with a frequency range of 0-800Hz. By using thinner polymer sheet and machining longer cantilever, the frequency response range can be extended up to a few kHz. ",
author = "J. Li and Xu, {S. M.} and Jining Sun and Tang, {Y. Q.} and Dong, {F. Z.}",
year = "2017",
month = apr,
day = "23",
doi = "10.1117/12.2263956",
language = "English",
isbn = "9781510610910",
series = "Proceedings of SPIE",
publisher = "SPIE",
editor = "Youngjoo Chung and Wei Jin and Byoungho Lee and John Canning and Kentaro Nakamura and Libo Yuan",
booktitle = "25th International Conference on Optical Fiber Sensors",
address = "United States",
note = "25th International Conference on Optical Fiber Sensors 2017, OFS 2017 ; Conference date: 24-04-2017 Through 28-04-2017",
}