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A laser-assisted bonding method using a liquid crystal polymer film for MEMS and sensor packaging
Xin Jiang,
Changhai Wang
, Wei Liu
School of Engineering & Physical Sciences
Institute of Sensors, Signals & Systems
Research output
:
Contribution to journal
›
Article
›
peer-review
6
Citations (Scopus)
647
Downloads (Pure)
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Dive into the research topics of 'A laser-assisted bonding method using a liquid crystal polymer film for MEMS and sensor packaging'. Together they form a unique fingerprint.
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INIS
bonding
100%
cavities
14%
color
14%
configuration
14%
cost
14%
design
14%
devices
14%
encapsulation
14%
films
100%
glass
14%
holes
14%
interfaces
14%
lasers
100%
leaks
28%
liquid crystals
100%
liquids
14%
microelectromechanical systems
100%
moisture
14%
monitoring
14%
packaging
100%
polymers
100%
pressure range mega pa
14%
range
14%
sensors
100%
shear
14%
silicon
14%
stability
14%
Material Science
Liquid Crystal Polymer
100%
Mechanical Strength
20%
Microelectromechanical System
100%
Polymer Films
100%
Silicon
20%
Engineering
Free Hole
20%
Leak Test
20%
Liquid Crystal
100%
Microelectromechanical System
100%
Moisture Resistance
20%
Temperature Stability
20%
Thermal Sensor
20%