Abstract
This paper presents a fully 3D printed accelerometer. With a multi-extruder 3D printer, the conductive PLA (polylactic acid) filament material was selectively printed on the normal PLA substrates to form the electrodes for the device. Therefore, both the conductive electrodes and the nonconductive mechanical structures of the capacitive accelerometer can be fully 3D printed within one hour without using any additional patterning process and metallization process. Compared with the traditional silicon- based fabrication methods, this approach is much faster and can fulfill the increasing demands of personalized customization. The fully 3D printed accelerometer had a sensitivity of 0.48 V/g, a nonlinearity error of 1.16% and exhibited good dynamic characteristics, which indicate the 3D printed device has a potential to be applied in movement monitoring in real time. The work demonstrates a fast and low-cost method for MEMS devices fabrication.
Original language | English |
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Title of host publication | 17th IEEE International Conference on Nano/Micro Engineered and Molecular Systems 2022 |
Publisher | IEEE |
Pages | 74-77 |
Number of pages | 4 |
ISBN (Electronic) | 9781665483018 |
DOIs | |
Publication status | Published - 10 Jun 2022 |
Event | 17th IEEE International Conference on Nano/Micro Engineered and Molecular Systems 2022 - Virtual, Online, Taiwan, Province of China Duration: 14 Apr 2022 → 17 Apr 2022 |
Conference
Conference | 17th IEEE International Conference on Nano/Micro Engineered and Molecular Systems 2022 |
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Abbreviated title | NEMS 2022 |
Country/Territory | Taiwan, Province of China |
City | Virtual, Online |
Period | 14/04/22 → 17/04/22 |
ASJC Scopus subject areas
- Biotechnology
- Molecular Biology
- Electrical and Electronic Engineering
- Mechanical Engineering
- Instrumentation