3D microfabrication in YAG crystals by direct laser writing and chemical etching

Debaditya Choudhury; Airan Rodenas; Lynn Paterson; Daniel Jaque; Ajoy K. Kar

doi:10.1109/CLEOPR.2013.6600562

3D microfabrication in YAG crystals by direct laser writing and chemical etching

Debaditya Choudhury, Airan Rodenas, Lynn Paterson, Daniel Jaque, Ajoy K. Kar

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

We report selective etching of mm-length direct laser written three-dimensional microstructures inside Nd:YAG crystals. The structures exhibit enhanced etching selectivity compared to unmodified YAG. Origin of this selectivity is investigated using Nd³⁺ micro-spectroscopy and micro-Raman.

Original language	English
Title of host publication	2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)
DOIs	https://doi.org/10.1109/CLEOPR.2013.6600562
Publication status	Published - 2013
Event	10th Conference on Lasers and Electro-Optics Pacific Rim - Kyoto, Kyoto, Japan Duration: 30 Jun 2013 → 4 Jul 2013

Conference

Conference	10th Conference on Lasers and Electro-Optics Pacific Rim
Abbreviated title	CLEOPR 2013
Country/Territory	Japan
City	Kyoto
Period	30/06/13 → 4/07/13

ASJC Scopus subject areas

Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

Access to Document

10.1109/CLEOPR.2013.6600562

Cite this

@inproceedings{0639ecaf22b14027911da21f1a838a4e,

title = "3D microfabrication in YAG crystals by direct laser writing and chemical etching",

abstract = "We report selective etching of mm-length direct laser written three-dimensional microstructures inside Nd:YAG crystals. The structures exhibit enhanced etching selectivity compared to unmodified YAG. Origin of this selectivity is investigated using Nd3+ micro-spectroscopy and micro-Raman.",

author = "Debaditya Choudhury and Airan Rodenas and Lynn Paterson and Daniel Jaque and Kar, {Ajoy K.}",

note = "INSPEC Accession Number: 13777391; 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEOPR 2013 ; Conference date: 30-06-2013 Through 04-07-2013",

year = "2013",

doi = "10.1109/CLEOPR.2013.6600562",

language = "English",

isbn = "9781467364751",

booktitle = "2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)",

}

TY - GEN

T1 - 3D microfabrication in YAG crystals by direct laser writing and chemical etching

AU - Choudhury, Debaditya

AU - Rodenas, Airan

AU - Paterson, Lynn

AU - Jaque, Daniel

AU - Kar, Ajoy K.

N1 - INSPEC Accession Number: 13777391

PY - 2013

Y1 - 2013

N2 - We report selective etching of mm-length direct laser written three-dimensional microstructures inside Nd:YAG crystals. The structures exhibit enhanced etching selectivity compared to unmodified YAG. Origin of this selectivity is investigated using Nd3+ micro-spectroscopy and micro-Raman.

AB - We report selective etching of mm-length direct laser written three-dimensional microstructures inside Nd:YAG crystals. The structures exhibit enhanced etching selectivity compared to unmodified YAG. Origin of this selectivity is investigated using Nd3+ micro-spectroscopy and micro-Raman.

UR - http://www.scopus.com/inward/record.url?scp=84885437607&partnerID=8YFLogxK

U2 - 10.1109/CLEOPR.2013.6600562

DO - 10.1109/CLEOPR.2013.6600562

M3 - Conference contribution

AN - SCOPUS:84885437607

SN - 9781467364751

BT - 2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR)

T2 - 10th Conference on Lasers and Electro-Optics Pacific Rim

Y2 - 30 June 2013 through 4 July 2013

ER -

3D microfabrication in YAG crystals by direct laser writing and chemical etching

Abstract

Conference

ASJC Scopus subject areas

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