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Research Output

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Patent
2006

Laser assisted system and method for bonding of surfaces, microcavity for packaging MEMS devices

Wang, C., Hand, D. P. & Bardin, F., 30 Nov 2006, IPC No. B23K 26/08 (2006.01), B81C 5/00 (2006.01), B23K 26/06 (2006.01), B23K 101/40 (2006.01), B81B 7/00 (2006.01), Patent No. PCT/GB2006/001971, Priority date 27 May 2005

Research output: Patent