CESEM: Quanta 650 FEG scanning electron microscope (SEM)

Equipment/facility: Equipment

Description

FEI Quant 650 FEG Scanning Electron Microscope (SEM), equipped with Oxford Instruments X-MaxN 150 mm energy dispersive x-ray detector.  This SEM can be operated in high vacuum, low vacuum and full environmental (ESEM) mode.  It can therefore image most materials and carry out elemental analysis, often with minimal sample preparation.  Available imaging detectors include secondary electron (SE), backscattered electron (BSE), cathodoluminescence (CL) and electron backscattered diffraction (EBSD).  The system is equipped with FEI's "MAPS" software which allows for the automated acquisition of large area high-resolution images, and the Oxford Instruments "Aztec" suite provides the possibility of acquiring elemental composition maps over large areas, elemental linescans and the ability to provide targeted particle analysis.

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Electron microscopes
Scanning
electron microscopes
scanning
electron
Vacuum
Detectors
Electrons
Chemical analysis
electrons
Cathodoluminescence
Image resolution
Electron diffraction
Imaging techniques
X rays
low vacuum
x ray detectors
high vacuum
cathodoluminescence
acquisition