Dataset supporting Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography

Christiaan Bekker (Creator)
Muhammad Junaid Arshad (Contributor)
Pasquale Cilibrizzi (Contributor)
Charalampos Nikolatos (Contributor)
Peter Lomax (Contributor)
Graham S. Wood (Contributor)
Rebecca Cheung (Contributor)
Wolfgang Knolle (Contributor)
Neil Ross (Contributor)
Brian D. Gerardot (Contributor)
Cristian Bonato (Contributor)

Dataset

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2023
Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
Bekker, C., Arshad, M. J., Cilibrizzi, P., Nikolatos, C., Lomax, P., Wood, G. S., Cheung, R., Knolle, W., Ross, N., Gerardot, B. D. & Bonato, C., 24 Apr 2023, In: Applied Physics Letters. 122, 17, 173507.
Research output: Contribution to journal › Article › peer-review

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14 Citations (Scopus)

136 Downloads (Pure)