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Dataset supporting Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography

Dataset

Description

Processed G2 data supporting publication: Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
Date made available27 Apr 2023
PublisherHeriot-Watt University
Date of data production27 Apr 2023

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