Bekker, C. (Creator), Arshad, M. J. (Contributor), Cilibrizzi, P. (Contributor), Nikolatos, C. (Contributor), Lomax, P. (Contributor), Wood, G. S. (Contributor), Cheung, R. (Contributor), Knolle, W. (Contributor), Ross, N. (Contributor), Gerardot, B. D. (Contributor), Bonato, C. (Contributor) (
27 Apr 2023). Dataset supporting Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography. Heriot-Watt University.
10.17861/f7f4f2cf-03af-43b3-ae17-af5de3f26a27