Dataset supporting Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography

  • Christiaan Bekker (Creator)
  • Muhammad Junaid Arshad (Contributor)
  • Pasquale Cilibrizzi (Contributor)
  • Charalampos Nikolatos (Contributor)
  • Peter Lomax (Contributor)
  • Graham S. Wood (Contributor)
  • Rebecca Cheung (Contributor)
  • Wolfgang Knolle (Contributor)
  • Neil Ross (Contributor)
  • Brian D. Gerardot (Contributor)
  • Cristian Bonato (Contributor)

Dataset

Description

Processed G2 data supporting publication: Scalable fabrication of hemispherical solid immersion lenses in silicon carbide through grayscale hard-mask lithography
Date made available27 Apr 2023
PublisherHeriot-Watt University
Date of data production27 Apr 2023

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